RHEED study of the texture in polycrystalline films of magnetite grown on oxidized silicon surface


2016

Балашев В. В., Викулов В. А., Димитриев А. А., Коробцов В. В., Писаренко Т. А.

Статьи в журналах

Solid State Phenomena

Switzerland, Durnten-Zurich, Trans Tech Publications

Physics and Technology of Nanostructured Materials IV, 2016, Vol. 247,

P.118-123.

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1012-0394, e- 1662-9779/ 978-3-03835-648-6

Balashev V.V., Vikulov V.A., Pisarenko T.A., Korobtsov V.V. RHEED study of the texture in polycrystalline films of magnetite grown on oxidized silicon surface // Solid State Phenomena, 2016,Vol. 247, P.118-123.

Polycrystalline films of magnetite (Fe3O4) with thickness of 75 nm were grown on SiO2/Si(001) surface by reactive deposition of Fe in O2 atmosphere. The growth of Fe3O4 films was carried out with the different oxygen pressures. The structure of films was monitored by reflection high-energy electron diffraction (RHEED) during the film growth. It was found that there is a range of oxygen pressure in which the growth of only textured Fe3O4 film takes place. Reactive deposition of Fe at lower oxygen pressure results in a growth of Fe3O4 film without a texture. In contrast at the deposition with higher oxygen pressure the texture in the Fe3O4 film remains but the appearance of hematite (α-Fe2O3) is observed.

10.4028/www.scientific.net/SSP.249.118

SSP.247.118.pdf