Structure and Optical Properties of Porous Silicon Formed on Silicon Substrates Treated with Compression Plasma Flow


2016

Непомнящий А. В., Bozenko M.V., Chusovitin E.A., Galkin N.G., Pustovalov E.V., Tkachev V.V., Mararov V.V., Astashinsky V.M., Kuzmitsky A.M.

Solid State Phenomena

Vol. 245,

pp 49-54 (2016)

Bozenko M.V., Chusovitin E.A., Galkin N.G., Pustovalov E.V., Tkachev V.V., Nepomnyaschiy A.V., Mararov V.V., Astashinsky V.M., Kuzmitsky A.M. Structure and Optical Properties of Porous Silicon Formed on Silicon Substrates Treated with Compression Plasma Flow // Solid State Phenomena - Vol. 245, pp 49-54 (2016)