Enhancement of the electron-stimulated desorption from amorphous aluminium oxide films on silicon during an increase in the substrate temperature
Enhancement of the electron-stimulated desorption from amorphous aluminium oxide films on silicon during an increase in the substrate temperature
2012
Статьи в журналах
TECHNICAL PHYSICS
MAIK NAUKA/INTERPERIODICA/SPRINGER, 233 SPRING ST, NEW YORK, NY 10013-1578 USA
Vol. 57, No.5
0,499
1063-7842
M.V. Ivanchenko, V.A. Gritsenko, A.V. Nepomnyashchii, A.A.Saranin. Enhancement of the electron-stimulated desorption from amorphous aluminium oxide films on silicon during an increase in the substrate temperature. Tech.Phys., 2012, Vol. 57, No.5, P.693-696