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Structure and Optical Properties of Porous Silicon Formed on Silicon Substrates Treated with Compression Plasma Flow

2016

Solid State Phenomena, Scopus

Solid State Phenomena

Vol. 245,

Bozenko M.V., Chusovitin E.A., Galkin N.G., Pustovalov E.V., Tkachev V.V., Nepomnyaschiy A.V., Mararov V.V., Astashinsky V.M., Kuzmitsky A.M. Structure and Optical Properties of Porous Silicon Formed on Silicon Substrates Treated with Compression Plasma Flow // Solid State Phenomena - Vol. 245, pp 49-54 (2016)