All-liquid laser-assisted fabrication of 3D-textured hybrid metal–semiconductor SERS platforms


2026

Кучмижак А. А., Мицай Е. В., Пильник А. А., Шевлягин А. В., Захаров А., Вавилов А., Левшакова А., Хайруллина Е., Маньшина А.

Optical Materials, Q2

Статьи в журналах

Zakharov A., Vavilov, A., Levshakova, A., Pilnik, A., Mitsai, E., Shevlyagin, A., Khairullina E., Kuchmizhak A., Manshina A. / All-Liquid Laser-Assisted Fabrication Of 3D-Textured Hybrid Metal–Semiconductor SERS Platforms // Optical Materials. – 2026. – Vol. 174. – P. 117955.

Volume 174, article number 117955, June 2026

We report an all-liquid, vacuum-free approach for fabricating hybrid metal–semiconductor platforms for surface-enhanced Raman scattering (SERS). Silicon wafers were textured into upright (Pyr-Si) and inverted pyramids (IPyr-Si) by anisotropic alkaline etching and Cu-assisted chemical etching, respectively, both yielding broadband antireflective morphologies. Subsequent laser-induced deposition (LID) enabled surfactant-free decoration of these 3D morphologies with Au, Ag, and bimetallic AuAg nanoparticles directly in solution. Scanning electron microscopy (SEM) images and energy dispersive X-ray spectroscopy (EDX) mapping versus exposure time reveal distinct Ag/Au growth modes consistent with plasmon-assisted and substrate-assisted pathways. SERS performance was benchmarked with rhodamine 6G (R6G) down to 10−12 M, delivering an enhancement factor of ∼2.9 × 109 for Ag/IPyr-Si. Practical sensing of ketoprofen and plasmon-driven catalytic dimerization of p-aminothiophenol (PATP) were also demonstrated. Compared with conventional vacuum-based techniques, this approach minimizes air exposure, lowers costs, and delivers conformal nanoparticle coverage on complex silicon morphologies, providing a scalable route to reproducible, high-performance SERS sensors and related optoelectronic interfaces.

https://doi.org/10.1016/j.optmat.2026.117955

https://www.sciencedirect.com/science/article/pii/S092534672600114X