Study of chitosan biopolymer as the resist for the submicron electronic lithography


2014

Вознесенский С. С., Кульчин Ю. Н., Непомнящий А. В.

Solid State Phenomena, Scopus

Solid State Phenomena

S.S. Voznesenskiy, A.V. Nepomnyaschiy, Y.N. Kulchin. Study of chitosan biopolymer as the resist for the submicron electronic lithography. Solid State Phenomena,2014, Vol. 213, P.180-185

Статьи в журналах

Switzerland. Zuerich: Trans Tech Publications Ltd

Vol. 213

978-3-03785-970-4