Enhancement of the electron-stimulated desorption from amorphous aluminium oxide films on silicon during an increase in the substrate temperature


2012

Иванченко М. В., Саранин А. А., V.A. Gritsenko, A.V. Nepomnyashchii

TECHNICAL PHYSICS

M.V. Ivanchenko, V.A. Gritsenko, A.V. Nepomnyashchii, A.A.Saranin. Enhancement of the electron-stimulated desorption from amorphous aluminium oxide films on silicon during an increase in the substrate temperature. Tech.Phys., 2012, Vol. 57, No.5, P.693-696

Статьи в журналах

MAIK NAUKA/INTERPERIODICA/SPRINGER, 233 SPRING ST, NEW YORK, NY 10013-1578 USA

Vol. 57, No.5

0,499

1063-7842

http://dx.doi.org/10.1134/S1063784212050155