Enhancement of the electron-stimulated desorption from amorphous aluminium oxide films on silicon during an increase in the substrate temperature


2012

Иванченко М. В., Саранин А. А., V.A. Gritsenko, A.V. Nepomnyashchii

0,499

M.V. Ivanchenko, V.A. Gritsenko, A.V. Nepomnyashchii, A.A.Saranin. Enhancement of the electron-stimulated desorption from amorphous aluminium oxide films on silicon during an increase in the substrate temperature. Tech.Phys., 2012, Vol. 57, No.5, P.693-696

MAIK NAUKA/INTERPERIODICA/SPRINGER, 233 SPRING ST, NEW YORK, NY 10013-1578 USA

Статьи в журналах

Vol. 57, No.5

1063-7842

TECHNICAL PHYSICS

http://dx.doi.org/10.1134/S1063784212050155