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Enhancement of the electron-stimulated desorption from amorphous aluminum oxide films on silicon during an increase in the substrate temperature

2012

Журнал технической физики, RSCI

Article

Technical Physics

USA. New York: MAIK Nauka/Interperiodica/Springer

2012

0044-4642

Ivanchenko M.V., Gritsenko V.A., Nepomnyashchii A.V., Saranin A.A. Enhancement of the electron-stimulated desorption from amorphous aluminum oxide films on silicon during an increase in the substrate temperature. Technical Physics // USA. New York: MAIK Nauka/Interperiodica/Springer. 2012. Vol.57. №35. Pp.693-696. DOI: 10.1134/S1063784212050155.1063-7842, e-1090-6525