Enhancement of the electron-stimulated desorption from amorphous aluminium oxide films on silicon during an increase in the substrate temperature


2012

Иванченко М. В., Саранин А. А., V.A. Gritsenko, A.V. Nepomnyashchii

Статьи в журналах

TECHNICAL PHYSICS

MAIK NAUKA/INTERPERIODICA/SPRINGER, 233 SPRING ST, NEW YORK, NY 10013-1578 USA

Vol. 57, No.5

P.693-696

0,499

1063-7842

M.V. Ivanchenko, V.A. Gritsenko, A.V. Nepomnyashchii, A.A.Saranin. Enhancement of the electron-stimulated desorption from amorphous aluminium oxide films on silicon during an increase in the substrate temperature. Tech.Phys., 2012, Vol. 57, No.5, P.693-696

http://dx.doi.org/10.1134/S1063784212050155